DUPRA is perfluorinated O-ring developed by Daikin Industries.
Daikin Industries adopts a consistent production from raw material production, forming and processing to packaging, and uses special technology of Daikin to design commodities. It can also design according to customer's requirements. The semiconductor industry will be competitive in the future. DUPRA is also developing towards a more prolonged lifetime.
Types and Physical Characteristics of DUPRA
For semiconductor applications, the use temperature of sealing materials will be increased. Daikin Industries has developed DUPRA series to enable customers to use its products at ease. Especially in the diffusion process, the sealing material is required to be used in a relatively heat-resistant and strict environment. DU353(E) is a material that has enhanced low adhesion and also has DU3R1(E) plasma resistance. The heat resistance comparison results with other perfluorinated O-rings are as follows:
In the high temperature field of semiconductor application, the problem of adhesion between sealing material and its contact surface has been widely discussed recently. Generally, sealing materials used in high temperature fields will become sticky, so PM will take longer time. Compared with the current perfluoro O-ring, DU300 series has successfully improved the problem of adhesion by using low adhesion treatment (E grade).
A very strict plasma environment is required in the semiconductor industry, so the lifetime of sealing materials is also greatly affected. DUPRA has an equal and wide range of plasma resistance and can perform well in the following plasma environments. The performance in DUPRA depends on the polymer, the bridging structure and the selection of filler. In semiconductor factories, good sealing is expected to have a longer lifetime as more stringent requirements are posed for the plasma environment.
In semiconductor factories, as more stringent requirements are posed for the plasma environment, the sealing is expected to have a longer lifetime.
It has quite a high demand for cleanliness in the semiconductor industry. Daikin Industries has been focusing on cleanliness from the very beginning of development. All products are required to maintain a high degree of cleanliness, and have higher cleanliness compared with other perfluorinated O-rings to contribute to the quality of semiconductor micronization processing.
All DUPRA products are packaged in a dust free room.